{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ag", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of D+ on Ag(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1118, "q": 0.1421, "mu": 1.756, "epsilonL": 0.0001815, "Eth": 48.18}, "E_min": 48.18, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
48.18	0.0	
56.31	0.0003439	
65.8	0.001503	
76.9	0.003825	
89.88	0.007548	
105.0	0.01257	
122.8	0.01836	
143.5	0.02424	
167.7	0.02964	
195.9	0.03429	
229.0	0.03817	
267.6	0.04138	
312.8	0.04405	
365.5	0.0463	
427.2	0.04822	
499.2	0.04987	
583.5	0.05129	
681.9	0.05249	
796.9	0.0535	
931.3	0.05431	
1088.0	0.05492	
1272.0	0.05533	
1487.0	0.05552	
1737.0	0.05549	
2030.0	0.05524	
2373.0	0.05475	
2773.0	0.05403	
3241.0	0.05307	
3788.0	0.0519	
4427.0	0.05051	
5173.0	0.04892	
6046.0	0.04715	
7066.0	0.04523	
8258.0	0.04317	
9650.0	0.04102	
11280.0	0.03878	
13180.0	0.03651	
15400.0	0.03421	
18000.0	0.03192	
21040.0	0.02966	
24590.0	0.02746	
28740.0	0.02532	
33580.0	0.02327	
39250.0	0.02131	
45870.0	0.01945	
53610.0	0.01771	
62650.0	0.01607	
73220.0	0.01455	
85570.0	0.01314	
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