pwiDB

Plasma-Surface Interaction Data Set 380

Sputtering of Xe⁺ on Pd(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe⁺ on Pd(pc) at 300 K

angle = 0.0 deg	E /eV	P
	23.66	8.117e-37
	28.06	8.528e-05
	33.27	0.0005385
	39.45	0.001841
	46.78	0.004893
	55.47	0.0113
	65.77	0.02373
	77.99	0.04627
	92.48	0.08441
	109.7	0.1441
	130.0	0.2297
	154.2	0.3413
	182.8	0.4742
	216.8	0.6206
	257.1	0.7732
	304.8	0.9279
	361.4	1.084
	428.6	1.241
	508.2	1.403
	602.6	1.571
	714.5	1.747
	847.3	1.933
	1005.0	2.131
	1191.0	2.341
	1413.0	2.565
	1675.0	2.804
	1986.0	3.057
	2355.0	3.326
	2793.0	3.611
	3311.0	3.911
	3927.0	4.225
	4656.0	4.555
	5521.0	4.899
	6547.0	5.256
	7763.0	5.624
	9205.0	6.004
	10910.0	6.393
	12940.0	6.788
	15350.0	7.19
	18200.0	7.594
	21580.0	7.998
	25590.0	8.401
	30340.0	8.798
	35980.0	9.187
	42660.0	9.565
	50580.0	9.927
	59980.0	10.27
	71120.0	10.59
	84330.0	10.89

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1879
q = 30.35
mu = 2.141
epsilonL = 1.126e-06
Eth = 23.66

Fit range

E = 23.66 – 100000