{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pd", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Xe+ on Pd(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1879, "q": 30.35, "mu": 2.141, "epsilonL": 1.126e-06, "Eth": 23.66}, "E_min": 23.66, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
23.66	8.117e-37	
28.06	8.528e-05	
33.27	0.0005385	
39.45	0.001841	
46.78	0.004893	
55.47	0.0113	
65.77	0.02373	
77.99	0.04627	
92.48	0.08441	
109.7	0.1441	
130.0	0.2297	
154.2	0.3413	
182.8	0.4742	
216.8	0.6206	
257.1	0.7732	
304.8	0.9279	
361.4	1.084	
428.6	1.241	
508.2	1.403	
602.6	1.571	
714.5	1.747	
847.3	1.933	
1005.0	2.131	
1191.0	2.341	
1413.0	2.565	
1675.0	2.804	
1986.0	3.057	
2355.0	3.326	
2793.0	3.611	
3311.0	3.911	
3927.0	4.225	
4656.0	4.555	
5521.0	4.899	
6547.0	5.256	
7763.0	5.624	
9205.0	6.004	
10910.0	6.393	
12940.0	6.788	
15350.0	7.19	
18200.0	7.594	
21580.0	7.998	
25590.0	8.401	
30340.0	8.798	
35980.0	9.187	
42660.0	9.565	
50580.0	9.927	
59980.0	10.27	
71120.0	10.59	
84330.0	10.89	
-----