pwiDB

Plasma-Surface Interaction Data Set 379

Sputtering of Pd⁺ on Pd(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Pd⁺ on Pd(pc) at 300 K

angle = 0.0 deg	E /eV	P
	19.43	0.0
	23.13	4.651e-05
	27.54	0.0003465
	32.79	0.001322
	39.04	0.003831
	46.47	0.009529
	55.33	0.02137
	65.87	0.04415
	78.42	0.08447
	93.37	0.1494
	111.2	0.2429
	132.3	0.3626
	157.6	0.5001
	187.6	0.645
	223.3	0.7907
	265.9	0.9349
	316.5	1.079
	376.8	1.224
	448.6	1.374
	534.1	1.532
	635.9	1.698
	757.1	1.874
	901.3	2.063
	1073.0	2.264
	1278.0	2.478
	1521.0	2.707
	1811.0	2.949
	2156.0	3.205
	2567.0	3.476
	3056.0	3.76
	3638.0	4.058
	4331.0	4.368
	5156.0	4.69
	6139.0	5.022
	7308.0	5.364
	8701.0	5.713
	10360.0	6.069
	12330.0	6.428
	14680.0	6.789
	17480.0	7.149
	20810.0	7.506
	24780.0	7.856
	29500.0	8.198
	35120.0	8.526
	41810.0	8.84
	49780.0	9.134
	59260.0	9.404
	70550.0	9.649
	84000.0	9.862

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.2531
q = 26.44
mu = 2.34
epsilonL = 1.517e-06
Eth = 19.43

Fit range

E = 19.43 – 100000