{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pd", "surface_phase": "pc", "species": {"text": "Pd+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Pd+ on Pd(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2531, "q": 26.44, "mu": 2.34, "epsilonL": 1.517e-06, "Eth": 19.43}, "E_min": 19.43, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
19.43	0.0	
23.13	4.651e-05	
27.54	0.0003465	
32.79	0.001322	
39.04	0.003831	
46.47	0.009529	
55.33	0.02137	
65.87	0.04415	
78.42	0.08447	
93.37	0.1494	
111.2	0.2429	
132.3	0.3626	
157.6	0.5001	
187.6	0.645	
223.3	0.7907	
265.9	0.9349	
316.5	1.079	
376.8	1.224	
448.6	1.374	
534.1	1.532	
635.9	1.698	
757.1	1.874	
901.3	2.063	
1073.0	2.264	
1278.0	2.478	
1521.0	2.707	
1811.0	2.949	
2156.0	3.205	
2567.0	3.476	
3056.0	3.76	
3638.0	4.058	
4331.0	4.368	
5156.0	4.69	
6139.0	5.022	
7308.0	5.364	
8701.0	5.713	
10360.0	6.069	
12330.0	6.428	
14680.0	6.789	
17480.0	7.149	
20810.0	7.506	
24780.0	7.856	
29500.0	8.198	
35120.0	8.526	
41810.0	8.84	
49780.0	9.134	
59260.0	9.404	
70550.0	9.649	
84000.0	9.862	
-----