pwiDB

Plasma-Surface Interaction Data Set 378

Sputtering of Kr⁺ on Pd(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Pd(pc) at 300 K

angle = 0.0 deg	E /eV	P
	22.03	0.0
	26.16	9.772e-05
	31.06	0.0007035
	36.89	0.002614
	43.8	0.007389
	52.01	0.01787
	61.77	0.03869
	73.35	0.07639
	87.1	0.1379
	103.4	0.2273
	122.8	0.3423
	145.9	0.4741
	173.2	0.6126
	205.7	0.7506
	244.2	0.8859
	290.0	1.019
	344.4	1.153
	409.0	1.289
	485.7	1.431
	576.8	1.58
	684.9	1.736
	813.3	1.902
	965.8	2.078
	1147.0	2.264
	1362.0	2.46
	1617.0	2.668
	1921.0	2.886
	2281.0	3.114
	2708.0	3.352
	3216.0	3.599
	3819.0	3.855
	4535.0	4.118
	5386.0	4.387
	6395.0	4.662
	7594.0	4.941
	9018.0	5.222
	10710.0	5.503
	12720.0	5.783
	15100.0	6.059
	17930.0	6.33
	21300.0	6.592
	25290.0	6.844
	30030.0	7.083
	35660.0	7.305
	42350.0	7.509
	50290.0	7.692
	59720.0	7.85
	70910.0	7.98
	84210.0	8.08

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1636
q = 20.91
mu = 2.305
epsilonL = 2.256e-06
Eth = 22.03

Fit range

E = 22.03 – 100000