{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pd", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Kr+ on Pd(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1636, "q": 20.91, "mu": 2.305, "epsilonL": 2.256e-06, "Eth": 22.03}, "E_min": 22.03, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
22.03	0.0	
26.16	9.772e-05	
31.06	0.0007035	
36.89	0.002614	
43.8	0.007389	
52.01	0.01787	
61.77	0.03869	
73.35	0.07639	
87.1	0.1379	
103.4	0.2273	
122.8	0.3423	
145.9	0.4741	
173.2	0.6126	
205.7	0.7506	
244.2	0.8859	
290.0	1.019	
344.4	1.153	
409.0	1.289	
485.7	1.431	
576.8	1.58	
684.9	1.736	
813.3	1.902	
965.8	2.078	
1147.0	2.264	
1362.0	2.46	
1617.0	2.668	
1921.0	2.886	
2281.0	3.114	
2708.0	3.352	
3216.0	3.599	
3819.0	3.855	
4535.0	4.118	
5386.0	4.387	
6395.0	4.662	
7594.0	4.941	
9018.0	5.222	
10710.0	5.503	
12720.0	5.783	
15100.0	6.059	
17930.0	6.33	
21300.0	6.592	
25290.0	6.844	
30030.0	7.083	
35660.0	7.305	
42350.0	7.509	
50290.0	7.692	
59720.0	7.85	
70910.0	7.98	
84210.0	8.08	
-----