pwiDB

Plasma-Surface Interaction Data Set 377

Sputtering of Ar⁺ on Pd(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Pd(pc) at 300 K

angle = 0.0 deg	E /eV	P
	18.15	0.0
	21.64	0.0002446
	25.8	0.001573
	30.76	0.005431
	36.67	0.01443
	43.72	0.03278
	52.12	0.06619
	62.13	0.1204
	74.08	0.1979
	88.31	0.2956
	105.3	0.4054
	125.5	0.5186
	149.7	0.6298
	178.4	0.7374
	212.7	0.8424
	253.6	0.9464
	302.3	1.051
	360.4	1.159
	429.7	1.27
	512.3	1.386
	610.8	1.507
	728.2	1.633
	868.1	1.765
	1035.0	1.901
	1234.0	2.043
	1471.0	2.188
	1754.0	2.338
	2091.0	2.491
	2493.0	2.647
	2972.0	2.804
	3543.0	2.961
	4224.0	3.118
	5036.0	3.274
	6004.0	3.426
	7158.0	3.575
	8533.0	3.717
	10170.0	3.852
	12130.0	3.979
	14460.0	4.095
	17240.0	4.199
	20550.0	4.289
	24500.0	4.364
	29210.0	4.421
	34830.0	4.459
	41520.0	4.477
	49500.0	4.473
	59010.0	4.446
	70360.0	4.396
	83880.0	4.322

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1147
q = 11.45
mu = 2.154
epsilonL = 6.435e-06
Eth = 18.15

Fit range

E = 18.15 – 100000