{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pd", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Pd(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1147, "q": 11.45, "mu": 2.154, "epsilonL": 6.435e-06, "Eth": 18.15}, "E_min": 18.15, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
18.15	0.0	
21.64	0.0002446	
25.8	0.001573	
30.76	0.005431	
36.67	0.01443	
43.72	0.03278	
52.12	0.06619	
62.13	0.1204	
74.08	0.1979	
88.31	0.2956	
105.3	0.4054	
125.5	0.5186	
149.7	0.6298	
178.4	0.7374	
212.7	0.8424	
253.6	0.9464	
302.3	1.051	
360.4	1.159	
429.7	1.27	
512.3	1.386	
610.8	1.507	
728.2	1.633	
868.1	1.765	
1035.0	1.901	
1234.0	2.043	
1471.0	2.188	
1754.0	2.338	
2091.0	2.491	
2493.0	2.647	
2972.0	2.804	
3543.0	2.961	
4224.0	3.118	
5036.0	3.274	
6004.0	3.426	
7158.0	3.575	
8533.0	3.717	
10170.0	3.852	
12130.0	3.979	
14460.0	4.095	
17240.0	4.199	
20550.0	4.289	
24500.0	4.364	
29210.0	4.421	
34830.0	4.459	
41520.0	4.477	
49500.0	4.473	
59010.0	4.446	
70360.0	4.396	
83880.0	4.322	
-----