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Plasma-Surface Interaction Data Set 374

Sputtering of 3He+ on Pd(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on Pd(pc) at 300 K

angle = 0.0 deg E /eV P
44.034.109e-31
51.550.00027
60.360.001248
70.670.003379
82.750.007214
96.880.01321
113.40.02147
132.80.03151
155.50.0424
182.10.05313
213.20.06299
249.60.07169
292.20.07925
342.10.0858
400.60.09155
469.00.09667
549.10.1013
643.00.1055
752.80.1093
881.40.1127
1032.00.1159
1208.00.1187
1415.00.1211
1656.00.1231
1939.00.1248
2271.00.126
2658.00.1268
3113.00.127
3644.00.1268
4267.00.126
4996.00.1247
5849.00.1229
6849.00.1205
8018.00.1176
9388.00.1142
10990.00.1104
12870.00.1062
15070.00.1016
17640.00.09672
20660.00.09164
24190.00.08643
28320.00.08113
33150.00.07582
38820.00.07055
45450.00.06538
53210.00.06035
62300.00.0555
72950.00.05086
85410.00.04645

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 44.03 – 100000