{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pd", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (3He)+ on Pd(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1429, "q": 0.3249, "mu": 1.797, "epsilonL": 9.054e-05, "Eth": 44.03}, "E_min": 44.03, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
44.03	4.109e-31	
51.55	0.00027	
60.36	0.001248	
70.67	0.003379	
82.75	0.007214	
96.88	0.01321	
113.4	0.02147	
132.8	0.03151	
155.5	0.0424	
182.1	0.05313	
213.2	0.06299	
249.6	0.07169	
292.2	0.07925	
342.1	0.0858	
400.6	0.09155	
469.0	0.09667	
549.1	0.1013	
643.0	0.1055	
752.8	0.1093	
881.4	0.1127	
1032.0	0.1159	
1208.0	0.1187	
1415.0	0.1211	
1656.0	0.1231	
1939.0	0.1248	
2271.0	0.126	
2658.0	0.1268	
3113.0	0.127	
3644.0	0.1268	
4267.0	0.126	
4996.0	0.1247	
5849.0	0.1229	
6849.0	0.1205	
8018.0	0.1176	
9388.0	0.1142	
10990.0	0.1104	
12870.0	0.1062	
15070.0	0.1016	
17640.0	0.09672	
20660.0	0.09164	
24190.0	0.08643	
28320.0	0.08113	
33150.0	0.07582	
38820.0	0.07055	
45450.0	0.06538	
53210.0	0.06035	
62300.0	0.0555	
72950.0	0.05086	
85410.0	0.04645	
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