Return to search

Plasma-Surface Interaction Data Set 373

Sputtering of T+ on Pd(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on Pd(pc) at 300 K

angle = 0.0 deg E /eV P
42.930.0
50.290.0002911
58.910.001121
69.010.002703
80.840.005286
94.690.009044
110.90.01396
129.90.01976
152.20.02598
178.30.0321
208.90.03774
244.70.04271
286.70.04696
335.80.05054
393.40.05355
460.80.05608
539.80.0582
632.40.05998
740.80.06144
867.80.06261
1017.00.06351
1191.00.06413
1395.00.06448
1634.00.06455
1914.00.06434
2242.00.06385
2627.00.06308
3077.00.06202
3605.00.06069
4223.00.0591
4947.00.05726
5795.00.05521
6788.00.05296
7952.00.05055
9315.00.04801
10910.00.04538
12780.00.0427
14970.00.03998
17540.00.03728
20550.00.03461
24070.00.032
28200.00.02947
33030.00.02705
38700.00.02474
45330.00.02255
53100.00.02049
62210.00.01857
72870.00.01678
85370.00.01513

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 42.93 – 100000