{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pd", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of T+ on Pd(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2011, "q": 0.1654, "mu": 1.569, "epsilonL": 0.0001849, "Eth": 42.93}, "E_min": 42.93, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
42.93	0.0	
50.29	0.0002911	
58.91	0.001121	
69.01	0.002703	
80.84	0.005286	
94.69	0.009044	
110.9	0.01396	
129.9	0.01976	
152.2	0.02598	
178.3	0.0321	
208.9	0.03774	
244.7	0.04271	
286.7	0.04696	
335.8	0.05054	
393.4	0.05355	
460.8	0.05608	
539.8	0.0582	
632.4	0.05998	
740.8	0.06144	
867.8	0.06261	
1017.0	0.06351	
1191.0	0.06413	
1395.0	0.06448	
1634.0	0.06455	
1914.0	0.06434	
2242.0	0.06385	
2627.0	0.06308	
3077.0	0.06202	
3605.0	0.06069	
4223.0	0.0591	
4947.0	0.05726	
5795.0	0.05521	
6788.0	0.05296	
7952.0	0.05055	
9315.0	0.04801	
10910.0	0.04538	
12780.0	0.0427	
14970.0	0.03998	
17540.0	0.03728	
20550.0	0.03461	
24070.0	0.032	
28200.0	0.02947	
33030.0	0.02705	
38700.0	0.02474	
45330.0	0.02255	
53100.0	0.02049	
62210.0	0.01857	
72870.0	0.01678	
85370.0	0.01513	
-----