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Plasma-Surface Interaction Data Set 372

Sputtering of D+ on Pd(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Pd(pc) at 300 K

angle = 0.0 deg E /eV P
61.220.0
71.20.0001486
82.810.000663
96.30.001733
112.00.003551
130.30.006202
151.50.009563
176.20.0133
204.90.017
238.30.02035
277.10.02321
322.30.02557
374.80.02747
435.90.02902
506.90.03028
589.60.03132
685.60.03216
797.40.03284
927.30.03337
1078.00.03377
1254.00.03402
1459.00.03415
1696.00.03414
1973.00.034
2294.00.03371
2668.00.03329
3103.00.03274
3609.00.03206
4197.00.03125
4881.00.03032
5677.00.02929
6602.00.02816
7678.00.02696
8930.00.02569
10390.00.02437
12080.00.02302
14050.00.02165
16340.00.02028
19000.00.01892
22090.00.01759
25690.00.01629
29880.00.01504
34750.00.01384
40420.00.01269
47000.00.01161
54660.00.01059
63570.00.009633
73940.00.008743
85990.00.007917

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 61.22 – 100000