{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pd", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of D+ on Pd(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1879, "q": 0.0875, "mu": 1.778, "epsilonL": 0.0001866, "Eth": 61.22}, "E_min": 61.22, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
61.22	0.0	
71.2	0.0001486	
82.81	0.000663	
96.3	0.001733	
112.0	0.003551	
130.3	0.006202	
151.5	0.009563	
176.2	0.0133	
204.9	0.017	
238.3	0.02035	
277.1	0.02321	
322.3	0.02557	
374.8	0.02747	
435.9	0.02902	
506.9	0.03028	
589.6	0.03132	
685.6	0.03216	
797.4	0.03284	
927.3	0.03337	
1078.0	0.03377	
1254.0	0.03402	
1459.0	0.03415	
1696.0	0.03414	
1973.0	0.034	
2294.0	0.03371	
2668.0	0.03329	
3103.0	0.03274	
3609.0	0.03206	
4197.0	0.03125	
4881.0	0.03032	
5677.0	0.02929	
6602.0	0.02816	
7678.0	0.02696	
8930.0	0.02569	
10390.0	0.02437	
12080.0	0.02302	
14050.0	0.02165	
16340.0	0.02028	
19000.0	0.01892	
22090.0	0.01759	
25690.0	0.01629	
29880.0	0.01504	
34750.0	0.01384	
40420.0	0.01269	
47000.0	0.01161	
54660.0	0.01059	
63570.0	0.009633	
73940.0	0.008743	
85990.0	0.007917	
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