pwiDB

Plasma-Surface Interaction Data Set 370

Sputtering of Xe⁺ on Rh(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe⁺ on Rh(pc) at 300 K

angle = 0.0 deg	E /eV	P
	34.98	0.0
	41.14	4.487e-05
	48.4	0.0003192
	56.93	0.00117
	66.97	0.003269
	78.78	0.007854
	92.68	0.01707
	109.0	0.03433
	128.2	0.06446
	150.9	0.113
	177.5	0.1846
	208.8	0.2797
	245.6	0.394
	288.9	0.5195
	339.8	0.649
	399.8	0.7777
	470.2	0.9045
	553.2	1.03
	650.7	1.157
	765.5	1.287
	900.5	1.421
	1059.0	1.562
	1246.0	1.71
	1466.0	1.866
	1724.0	2.031
	2028.0	2.206
	2386.0	2.39
	2807.0	2.585
	3302.0	2.789
	3884.0	3.003
	4569.0	3.226
	5375.0	3.458
	6323.0	3.699
	7438.0	3.948
	8749.0	4.204
	10290.0	4.466
	12110.0	4.733
	14240.0	5.004
	16750.0	5.278
	19710.0	5.553
	23180.0	5.827
	27270.0	6.098
	32080.0	6.366
	37740.0	6.628
	44390.0	6.881
	52220.0	7.124
	61430.0	7.354
	72270.0	7.57
	85010.0	7.767

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.248
q = 21.6
mu = 2.316
epsilonL = 1.134e-06
Eth = 34.98

Fit range

E = 34.98 – 100000