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Plasma-Surface Interaction Data Set 369

Sputtering of Kr+ on Rh(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr+ on Rh(pc) at 300 K

angle = 0.0 deg E /eV P
33.694.034e-36
39.660.0001507
46.690.000916
54.960.003033
64.70.007812
76.170.01743
89.670.03523
105.60.06565
124.30.1136
146.30.1825
172.20.2726
202.80.3796
238.70.4968
281.00.6177
330.80.7381
389.50.8565
458.50.9736
539.81.091
635.51.209
748.11.331
880.71.456
1037.01.587
1221.01.724
1437.01.867
1692.02.016
1991.02.172
2344.02.334
2760.02.502
3249.02.677
3825.02.857
4503.03.042
5301.03.231
6241.03.423
7347.03.618
8649.03.815
10180.04.012
11990.04.208
14110.04.403
16610.04.594
19560.04.78
23020.04.96
27110.05.132
31910.05.294
37570.05.446
44220.05.584
52060.05.707
61290.05.813
72150.05.9
84940.05.967

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 33.69 – 100000