{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Rh", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Kr+ on Rh(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1467, "q": 15.43, "mu": 2.114, "epsilonL": 2.281e-06, "Eth": 33.69}, "E_min": 33.69, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
33.69	4.034e-36	
39.66	0.0001507	
46.69	0.000916	
54.96	0.003033	
64.7	0.007812	
76.17	0.01743	
89.67	0.03523	
105.6	0.06565	
124.3	0.1136	
146.3	0.1825	
172.2	0.2726	
202.8	0.3796	
238.7	0.4968	
281.0	0.6177	
330.8	0.7381	
389.5	0.8565	
458.5	0.9736	
539.8	1.091	
635.5	1.209	
748.1	1.331	
880.7	1.456	
1037.0	1.587	
1221.0	1.724	
1437.0	1.867	
1692.0	2.016	
1991.0	2.172	
2344.0	2.334	
2760.0	2.502	
3249.0	2.677	
3825.0	2.857	
4503.0	3.042	
5301.0	3.231	
6241.0	3.423	
7347.0	3.618	
8649.0	3.815	
10180.0	4.012	
11990.0	4.208	
14110.0	4.403	
16610.0	4.594	
19560.0	4.78	
23020.0	4.96	
27110.0	5.132	
31910.0	5.294	
37570.0	5.446	
44220.0	5.584	
52060.0	5.707	
61290.0	5.813	
72150.0	5.9	
84940.0	5.967	
-----