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Plasma-Surface Interaction Data Set 368

Sputtering of Ar+ on Rh(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar+ on Rh(pc) at 300 K

angle = 0.0 deg E /eV P
24.896.286e-37
29.490.0001572
34.930.001008
41.370.003464
49.010.009172
58.050.02085
68.770.04241
81.460.0784
96.490.1322
114.30.2035
135.40.2878
160.40.3781
190.00.4683
225.00.5553
266.50.6388
315.70.7196
374.00.7992
443.00.879
524.80.9601
621.61.043
736.31.129
872.21.217
1033.01.308
1224.01.402
1450.01.499
1717.01.598
2034.01.699
2409.01.801
2854.01.905
3381.02.009
4005.02.113
4744.02.216
5619.02.317
6656.02.415
7884.02.511
9339.02.602
11060.02.688
13100.02.768
15520.02.84
18390.02.905
21780.02.96
25800.03.004
30560.03.037
36200.03.058
42880.03.066
50790.03.059
60170.03.038
71270.03.002
84420.02.95

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 24.89 – 100000