{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Rh", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Rh(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1519, "q": 7.838, "mu": 2.167, "epsilonL": 6.549e-06, "Eth": 24.89}, "E_min": 24.89, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
24.89	6.286e-37	
29.49	0.0001572	
34.93	0.001008	
41.37	0.003464	
49.01	0.009172	
58.05	0.02085	
68.77	0.04241	
81.46	0.0784	
96.49	0.1322	
114.3	0.2035	
135.4	0.2878	
160.4	0.3781	
190.0	0.4683	
225.0	0.5553	
266.5	0.6388	
315.7	0.7196	
374.0	0.7992	
443.0	0.879	
524.8	0.9601	
621.6	1.043	
736.3	1.129	
872.2	1.217	
1033.0	1.308	
1224.0	1.402	
1450.0	1.499	
1717.0	1.598	
2034.0	1.699	
2409.0	1.801	
2854.0	1.905	
3381.0	2.009	
4005.0	2.113	
4744.0	2.216	
5619.0	2.317	
6656.0	2.415	
7884.0	2.511	
9339.0	2.602	
11060.0	2.688	
13100.0	2.768	
15520.0	2.84	
18390.0	2.905	
21780.0	2.96	
25800.0	3.004	
30560.0	3.037	
36200.0	3.058	
42880.0	3.066	
50790.0	3.059	
60170.0	3.038	
71270.0	3.002	
84420.0	2.95	
-----