pwiDB

Plasma-Surface Interaction Data Set 367

Sputtering of Ne⁺ on Rh(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Rh(pc) at 300 K

angle = 0.0 deg	E /eV	P
	23.3	0.0
	27.63	0.0002203
	32.78	0.001301
	38.88	0.004226
	46.12	0.01066
	54.7	0.02306
	64.88	0.04443
	76.96	0.07725
	91.29	0.1219
	108.3	0.1757
	128.4	0.234
	152.3	0.2923
	180.7	0.3481
	214.3	0.4007
	254.2	0.4506
	301.6	0.4987
	357.7	0.5457
	424.3	0.5926
	503.2	0.6396
	596.9	0.6872
	708.0	0.7354
	839.8	0.7843
	996.1	0.8338
	1182.0	0.8838
	1401.0	0.9339
	1662.0	0.9841
	1972.0	1.034
	2339.0	1.083
	2774.0	1.131
	3291.0	1.178
	3903.0	1.223
	4630.0	1.265
	5491.0	1.305
	6514.0	1.341
	7726.0	1.374
	9164.0	1.402
	10870.0	1.426
	12890.0	1.444
	15290.0	1.456
	18140.0	1.463
	21520.0	1.462
	25520.0	1.454
	30270.0	1.439
	35910.0	1.417
	42590.0	1.388
	50520.0	1.351
	59920.0	1.309
	71080.0	1.26
	84310.0	1.206

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.131
q = 3.741
mu = 2.06
epsilonL = 1.454e-05
Eth = 23.3

Fit range

E = 23.3 – 100000