{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Rh", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on Rh(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.131, "q": 3.741, "mu": 2.06, "epsilonL": 1.454e-05, "Eth": 23.3}, "E_min": 23.3, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
23.3	0.0	
27.63	0.0002203	
32.78	0.001301	
38.88	0.004226	
46.12	0.01066	
54.7	0.02306	
64.88	0.04443	
76.96	0.07725	
91.29	0.1219	
108.3	0.1757	
128.4	0.234	
152.3	0.2923	
180.7	0.3481	
214.3	0.4007	
254.2	0.4506	
301.6	0.4987	
357.7	0.5457	
424.3	0.5926	
503.2	0.6396	
596.9	0.6872	
708.0	0.7354	
839.8	0.7843	
996.1	0.8338	
1182.0	0.8838	
1401.0	0.9339	
1662.0	0.9841	
1972.0	1.034	
2339.0	1.083	
2774.0	1.131	
3291.0	1.178	
3903.0	1.223	
4630.0	1.265	
5491.0	1.305	
6514.0	1.341	
7726.0	1.374	
9164.0	1.402	
10870.0	1.426	
12890.0	1.444	
15290.0	1.456	
18140.0	1.463	
21520.0	1.462	
25520.0	1.454	
30270.0	1.439	
35910.0	1.417	
42590.0	1.388	
50520.0	1.351	
59920.0	1.309	
71080.0	1.26	
84310.0	1.206	
-----