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Plasma-Surface Interaction Data Set 366

Sputtering of 4He+ on Rh(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on Rh(pc) at 300 K

angle = 0.0 deg E /eV P
49.022.05e-35
57.260.0001703
66.90.0009676
78.160.002948
91.310.006732
106.70.01265
124.60.02031
145.60.0287
170.10.03671
198.70.04371
232.20.04958
271.20.05448
316.90.05864
370.20.06227
432.50.06551
505.20.06845
590.30.07116
689.60.07367
805.60.07598
941.20.07811
1100.00.08003
1285.00.08174
1501.00.08323
1753.00.08446
2048.00.08542
2393.00.08609
2796.00.08645
3266.00.08648
3816.00.08617
4458.00.08551
5208.00.08449
6084.00.08311
7108.00.08139
8304.00.07932
9701.00.07695
11330.00.07428
13240.00.07137
15470.00.06824
18070.00.06493
21110.00.0615
24670.00.05798
28820.00.05441
33670.00.05085
39330.00.04732
45950.00.04387
53680.00.04051
62710.00.03727
73270.00.03418
85600.00.03124

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 49.02 – 100000