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Plasma-Surface Interaction Data Set 363

Sputtering of D+ on Rh(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Rh(pc) at 300 K

angle = 0.0 deg E /eV P
85.570.0
98.834.986e-05
114.20.0002385
131.90.0006567
152.30.001419
175.90.002631
203.20.004333
234.70.00644
271.10.00875
313.20.01101
361.70.01304
417.80.01473
482.60.01609
557.40.01716
643.90.01798
743.70.01861
859.00.01909
992.20.01944
1146.00.01968
1324.00.01983
1529.00.01989
1766.00.01987
2040.00.01977
2356.00.01959
2722.00.01934
3144.00.01901
3631.00.01861
4194.00.01815
4845.00.01763
5596.00.01704
6464.00.01641
7466.00.01574
8624.00.01503
9961.00.0143
11510.00.01355
13290.00.01279
15350.00.01202
17730.00.01126
20480.00.01052
23660.00.009786
27320.00.009077
31560.00.008394
36460.00.007741
42110.00.007118
48640.00.006529
56180.00.005974
64890.00.005454
74950.00.004968
86580.00.004517

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 85.57 – 100000