{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Rh", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of D+ on Rh(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3593, "q": 0.0511, "mu": 1.871, "epsilonL": 0.0001919, "Eth": 85.57}, "E_min": 85.57, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
85.57	0.0	
98.83	4.986e-05	
114.2	0.0002385	
131.9	0.0006567	
152.3	0.001419	
175.9	0.002631	
203.2	0.004333	
234.7	0.00644	
271.1	0.00875	
313.2	0.01101	
361.7	0.01304	
417.8	0.01473	
482.6	0.01609	
557.4	0.01716	
643.9	0.01798	
743.7	0.01861	
859.0	0.01909	
992.2	0.01944	
1146.0	0.01968	
1324.0	0.01983	
1529.0	0.01989	
1766.0	0.01987	
2040.0	0.01977	
2356.0	0.01959	
2722.0	0.01934	
3144.0	0.01901	
3631.0	0.01861	
4194.0	0.01815	
4845.0	0.01763	
5596.0	0.01704	
6464.0	0.01641	
7466.0	0.01574	
8624.0	0.01503	
9961.0	0.0143	
11510.0	0.01355	
13290.0	0.01279	
15350.0	0.01202	
17730.0	0.01126	
20480.0	0.01052	
23660.0	0.009786	
27320.0	0.009077	
31560.0	0.008394	
36460.0	0.007741	
42110.0	0.007118	
48640.0	0.006529	
56180.0	0.005974	
64890.0	0.005454	
74950.0	0.004968	
86580.0	0.004517	
-----