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Plasma-Surface Interaction Data Set 361

Sputtering of Xe+ on Ru(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe+ on Ru(pc) at 300 K

angle = 0.0 deg E /eV P
43.480.0
50.920.0001199
59.630.000711
69.840.002311
81.790.005865
95.790.01296
112.20.0261
131.40.04891
153.90.086
180.20.1422
211.00.2209
247.10.3222
289.40.4422
339.00.5743
397.00.7117
464.90.85
544.50.987
637.71.123
746.81.258
874.61.395
1024.01.536
1200.01.68
1405.01.83
1645.01.987
1927.02.15
2257.02.321
2643.02.499
3095.02.685
3625.02.878
4245.03.079
4971.03.286
5822.03.499
6818.03.719
7985.03.943
9352.04.171
10950.04.402
12830.04.635
15020.04.869
17590.05.102
20600.05.333
24130.05.561
28260.05.784
33090.06.001
38760.06.209
45390.06.406
53160.06.592
62260.06.763
72910.06.919
85390.07.056

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 43.48 – 100000