{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ru", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Xe+ on Ru(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1828, "q": 18.91, "mu": 2.095, "epsilonL": 1.496e-06, "Eth": 43.48}, "E_min": 43.48, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
43.48	0.0	
50.92	0.0001199	
59.63	0.000711	
69.84	0.002311	
81.79	0.005865	
95.79	0.01296	
112.2	0.0261	
131.4	0.04891	
153.9	0.086	
180.2	0.1422	
211.0	0.2209	
247.1	0.3222	
289.4	0.4422	
339.0	0.5743	
397.0	0.7117	
464.9	0.85	
544.5	0.987	
637.7	1.123	
746.8	1.258	
874.6	1.395	
1024.0	1.536	
1200.0	1.68	
1405.0	1.83	
1645.0	1.987	
1927.0	2.15	
2257.0	2.321	
2643.0	2.499	
3095.0	2.685	
3625.0	2.878	
4245.0	3.079	
4971.0	3.286	
5822.0	3.499	
6818.0	3.719	
7985.0	3.943	
9352.0	4.171	
10950.0	4.402	
12830.0	4.635	
15020.0	4.869	
17590.0	5.102	
20600.0	5.333	
24130.0	5.561	
28260.0	5.784	
33090.0	6.001	
38760.0	6.209	
45390.0	6.406	
53160.0	6.592	
62260.0	6.763	
72910.0	6.919	
85390.0	7.056	
-----