pwiDB

Plasma-Surface Interaction Data Set 360

Sputtering of Kr⁺ on Ru(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Ru(pc) at 300 K

angle = 0.0 deg	E /eV	P
	35.68	0.0
	41.96	5.32e-05
	49.34	0.0003938
	58.01	0.001479
	68.22	0.004201
	80.21	0.0102
	94.32	0.02228
	110.9	0.04469
	130.4	0.0828
	153.3	0.1416
	180.3	0.2227
	212.0	0.3224
	249.3	0.4328
	293.2	0.5456
	344.7	0.6559
	405.3	0.7621
	476.6	0.8652
	560.5	0.9669
	659.0	1.069
	774.9	1.174
	911.2	1.282
	1071.0	1.394
	1260.0	1.511
	1481.0	1.634
	1742.0	1.762
	2048.0	1.895
	2409.0	2.034
	2832.0	2.179
	3330.0	2.328
	3916.0	2.482
	4605.0	2.639
	5414.0	2.8
	6367.0	2.964
	7486.0	3.13
	8803.0	3.297
	10350.0	3.464
	12170.0	3.631
	14310.0	3.795
	16830.0	3.956
	19790.0	4.114
	23270.0	4.265
	27360.0	4.41
	32170.0	4.546
	37830.0	4.673
	44480.0	4.788
	52310.0	4.891
	61510.0	4.978
	72320.0	5.05
	85040.0	5.105

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.2419
q = 13.18
mu = 2.368
epsilonL = 2.323e-06
Eth = 35.68

Fit range

E = 35.68 – 100000