{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ru", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Kr+ on Ru(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2419, "q": 13.18, "mu": 2.368, "epsilonL": 2.323e-06, "Eth": 35.68}, "E_min": 35.68, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
35.68	0.0	
41.96	5.32e-05	
49.34	0.0003938	
58.01	0.001479	
68.22	0.004201	
80.21	0.0102	
94.32	0.02228	
110.9	0.04469	
130.4	0.0828	
153.3	0.1416	
180.3	0.2227	
212.0	0.3224	
249.3	0.4328	
293.2	0.5456	
344.7	0.6559	
405.3	0.7621	
476.6	0.8652	
560.5	0.9669	
659.0	1.069	
774.9	1.174	
911.2	1.282	
1071.0	1.394	
1260.0	1.511	
1481.0	1.634	
1742.0	1.762	
2048.0	1.895	
2409.0	2.034	
2832.0	2.179	
3330.0	2.328	
3916.0	2.482	
4605.0	2.639	
5414.0	2.8	
6367.0	2.964	
7486.0	3.13	
8803.0	3.297	
10350.0	3.464	
12170.0	3.631	
14310.0	3.795	
16830.0	3.956	
19790.0	4.114	
23270.0	4.265	
27360.0	4.41	
32170.0	4.546	
37830.0	4.673	
44480.0	4.788	
52310.0	4.891	
61510.0	4.978	
72320.0	5.05	
85040.0	5.105	
-----