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Plasma-Surface Interaction Data Set 359

Sputtering of Ar+ on Ru(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar+ on Ru(pc) at 300 K

angle = 0.0 deg E /eV P
27.481.309e-37
32.480.0001144
38.40.0007525
45.390.002627
53.660.007046
63.440.01623
74.990.03353
88.650.06312
104.80.1087
123.90.1714
146.50.2478
173.10.3316
204.70.4165
242.00.4986
286.00.5767
338.10.6515
399.70.7244
472.50.7967
558.60.8694
660.40.9434
780.71.019
922.91.097
1091.01.177
1290.01.26
1525.01.344
1802.01.43
2131.01.518
2519.01.607
2977.01.696
3520.01.786
4161.01.875
4919.01.964
5815.02.05
6874.02.134
8126.02.215
9607.02.293
11360.02.365
13430.02.432
15870.02.493
18760.02.547
22180.02.592
26220.02.628
30990.02.655
36640.02.67
43310.02.674
51200.02.666
60530.02.646
71560.02.612
84590.02.566

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 27.48 – 100000