{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ru", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Ar+ on Ru(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1872, "q": 6.838, "mu": 2.204, "epsilonL": 6.696e-06, "Eth": 27.48}, "E_min": 27.48, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
27.48	1.309e-37	
32.48	0.0001144	
38.4	0.0007525	
45.39	0.002627	
53.66	0.007046	
63.44	0.01623	
74.99	0.03353	
88.65	0.06312	
104.8	0.1087	
123.9	0.1714	
146.5	0.2478	
173.1	0.3316	
204.7	0.4165	
242.0	0.4986	
286.0	0.5767	
338.1	0.6515	
399.7	0.7244	
472.5	0.7967	
558.6	0.8694	
660.4	0.9434	
780.7	1.019	
922.9	1.097	
1091.0	1.177	
1290.0	1.26	
1525.0	1.344	
1802.0	1.43	
2131.0	1.518	
2519.0	1.607	
2977.0	1.696	
3520.0	1.786	
4161.0	1.875	
4919.0	1.964	
5815.0	2.05	
6874.0	2.134	
8126.0	2.215	
9607.0	2.293	
11360.0	2.365	
13430.0	2.432	
15870.0	2.493	
18760.0	2.547	
22180.0	2.592	
26220.0	2.628	
30990.0	2.655	
36640.0	2.67	
43310.0	2.674	
51200.0	2.666	
60530.0	2.646	
71560.0	2.612	
84590.0	2.566	
-----