pwiDB

Plasma-Surface Interaction Data Set 358

Sputtering of Ne⁺ on Ru(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Ru(pc) at 300 K

angle = 0.0 deg	E /eV	P
	30.91	0.0001812
	36.58	0.001107
	43.29	0.003668
	51.22	0.009383
	60.62	0.02053
	71.73	0.03991
	84.89	0.06983
	100.5	0.1106
	118.9	0.1596
	140.7	0.2123
	166.5	0.2646
	197.0	0.3142
	233.1	0.3605
	275.9	0.4041
	326.5	0.4458
	386.3	0.4865
	457.2	0.5268
	541.0	0.5671
	640.2	0.6078
	757.6	0.6489
	896.5	0.6904
	1061.0	0.7323
	1255.0	0.7745
	1486.0	0.8167
	1758.0	0.8588
	2081.0	0.9005
	2462.0	0.9415
	2914.0	0.9815
	3448.0	1.02
	4080.0	1.057
	4828.0	1.092
	5714.0	1.124
	6761.0	1.154
	8001.0	1.18
	9468.0	1.202
	11200.0	1.221
	13260.0	1.235
	15690.0	1.243
	18570.0	1.247
	21970.0	1.245
	26000.0	1.237
	30770.0	1.223
	36410.0	1.203
	43090.0	1.177
	50990.0	1.145
	60340.0	1.108
	71410.0	1.066
	84500.0	1.02

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1389
q = 3.188
mu = 2.109
epsilonL = 1.49e-05
Eth = 26.12

Fit range

E = 26.12 – 100000