{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ru", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on Ru(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1389, "q": 3.188, "mu": 2.109, "epsilonL": 1.49e-05, "Eth": 26.12}, "E_min": 26.12, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
30.91	0.0001812	
36.58	0.001107	
43.29	0.003668	
51.22	0.009383	
60.62	0.02053	
71.73	0.03991	
84.89	0.06983	
100.5	0.1106	
118.9	0.1596	
140.7	0.2123	
166.5	0.2646	
197.0	0.3142	
233.1	0.3605	
275.9	0.4041	
326.5	0.4458	
386.3	0.4865	
457.2	0.5268	
541.0	0.5671	
640.2	0.6078	
757.6	0.6489	
896.5	0.6904	
1061.0	0.7323	
1255.0	0.7745	
1486.0	0.8167	
1758.0	0.8588	
2081.0	0.9005	
2462.0	0.9415	
2914.0	0.9815	
3448.0	1.02	
4080.0	1.057	
4828.0	1.092	
5714.0	1.124	
6761.0	1.154	
8001.0	1.18	
9468.0	1.202	
11200.0	1.221	
13260.0	1.235	
15690.0	1.243	
18570.0	1.247	
21970.0	1.245	
26000.0	1.237	
30770.0	1.223	
36410.0	1.203	
43090.0	1.177	
50990.0	1.145	
60340.0	1.108	
71410.0	1.066	
84500.0	1.02	
-----