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Plasma-Surface Interaction Data Set 357

Sputtering of ⁴He⁺ on Ru(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of ⁴He⁺ on Ru(pc) at 300 K

angle = 0.0 deg	E /eV	P
	57.43	0.0
	66.87	0.0002489
	77.88	0.001079
	90.69	0.002798
	105.6	0.005776
	123.0	0.01032
	143.2	0.01649
	166.8	0.02397
	194.2	0.03214
	226.1	0.04029
	263.3	0.04787
	306.7	0.0546
	357.1	0.06043
	415.9	0.06544
	484.3	0.06976
	563.9	0.07352
	656.7	0.07682
	764.7	0.07974
	890.5	0.08233
	1037.0	0.08461
	1208.0	0.08662
	1406.0	0.08834
	1638.0	0.08977
	1907.0	0.09091
	2221.0	0.09174
	2586.0	0.09224
	3011.0	0.09241
	3507.0	0.09223
	4084.0	0.09168
	4755.0	0.09076
	5538.0	0.08948
	6449.0	0.08784
	7510.0	0.08584
	8745.0	0.0835
	10180.0	0.08086
	11860.0	0.07794
	13810.0	0.07478
	16080.0	0.07142
	18730.0	0.0679
	21810.0	0.06426
	25390.0	0.06055
	29570.0	0.05682
	34440.0	0.0531
	40100.0	0.04943
	46700.0	0.04584
	54380.0	0.04236
	63330.0	0.03901
	73740.0	0.03581
	85870.0	0.03277

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1617
q = 0.2364
mu = 1.729
epsilonL = 9.488e-05
Eth = 57.43

Fit range

E = 57.43 – 100000