{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ru", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of (4He)+ on Ru(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1617, "q": 0.2364, "mu": 1.729, "epsilonL": 9.488e-05, "Eth": 57.43}, "E_min": 57.43, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
57.43	0.0	
66.87	0.0002489	
77.88	0.001079	
90.69	0.002798	
105.6	0.005776	
123.0	0.01032	
143.2	0.01649	
166.8	0.02397	
194.2	0.03214	
226.1	0.04029	
263.3	0.04787	
306.7	0.0546	
357.1	0.06043	
415.9	0.06544	
484.3	0.06976	
563.9	0.07352	
656.7	0.07682	
764.7	0.07974	
890.5	0.08233	
1037.0	0.08461	
1208.0	0.08662	
1406.0	0.08834	
1638.0	0.08977	
1907.0	0.09091	
2221.0	0.09174	
2586.0	0.09224	
3011.0	0.09241	
3507.0	0.09223	
4084.0	0.09168	
4755.0	0.09076	
5538.0	0.08948	
6449.0	0.08784	
7510.0	0.08584	
8745.0	0.0835	
10180.0	0.08086	
11860.0	0.07794	
13810.0	0.07478	
16080.0	0.07142	
18730.0	0.0679	
21810.0	0.06426	
25390.0	0.06055	
29570.0	0.05682	
34440.0	0.0531	
40100.0	0.04943	
46700.0	0.04584	
54380.0	0.04236	
63330.0	0.03901	
73740.0	0.03581	
85870.0	0.03277	
-----