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Plasma-Surface Interaction Data Set 356

Sputtering of 3He+ on Ru(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on Ru(pc) at 300 K

angle = 0.0 deg E /eV P
72.760.0
84.320.0001856
97.720.0008332
113.20.002208
131.20.004642
152.10.008431
176.30.01369
204.30.02021
236.70.02746
274.30.03479
317.90.04163
368.40.04769
427.00.05288
494.80.05728
573.50.06099
664.60.06415
770.20.06686
892.50.06921
1034.00.07123
1199.00.07298
1389.00.07447
1610.00.07571
1866.00.07669
2162.00.07742
2506.00.07789
2904.00.07808
3365.00.07799
3900.00.07761
4520.00.07695
5238.00.07599
6070.00.07473
7034.00.0732
8152.00.07139
9447.00.06934
10950.00.06704
12690.00.06455
14700.00.06188
17040.00.05906
19750.00.05613
22890.00.05313
26520.00.05008
30740.00.04703
35620.00.04399
41280.00.041
47840.00.03809
55440.00.03526
64250.00.03254
74460.00.02994
86290.00.02747

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 72.76 – 100000