{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ru", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (3He)+ on Ru(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.199, "q": 0.1998, "mu": 1.783, "epsilonL": 9.577e-05, "Eth": 72.76}, "E_min": 72.76, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
72.76	0.0	
84.32	0.0001856	
97.72	0.0008332	
113.2	0.002208	
131.2	0.004642	
152.1	0.008431	
176.3	0.01369	
204.3	0.02021	
236.7	0.02746	
274.3	0.03479	
317.9	0.04163	
368.4	0.04769	
427.0	0.05288	
494.8	0.05728	
573.5	0.06099	
664.6	0.06415	
770.2	0.06686	
892.5	0.06921	
1034.0	0.07123	
1199.0	0.07298	
1389.0	0.07447	
1610.0	0.07571	
1866.0	0.07669	
2162.0	0.07742	
2506.0	0.07789	
2904.0	0.07808	
3365.0	0.07799	
3900.0	0.07761	
4520.0	0.07695	
5238.0	0.07599	
6070.0	0.07473	
7034.0	0.0732	
8152.0	0.07139	
9447.0	0.06934	
10950.0	0.06704	
12690.0	0.06455	
14700.0	0.06188	
17040.0	0.05906	
19750.0	0.05613	
22890.0	0.05313	
26520.0	0.05008	
30740.0	0.04703	
35620.0	0.04399	
41280.0	0.041	
47840.0	0.03809	
55440.0	0.03526	
64250.0	0.03254	
74460.0	0.02994	
86290.0	0.02747	
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