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Plasma-Surface Interaction Data Set 354

Sputtering of D+ on Ru(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Ru(pc) at 300 K

angle = 0.0 deg E /eV P
97.530.0
112.44.936e-05
129.40.0002506
149.10.0007104
171.80.001551
197.90.002859
227.90.00461
262.60.006638
302.50.00869
348.50.01055
401.40.0121
462.40.01333
532.70.01427
613.70.01499
707.00.01554
814.40.01595
938.20.01625
1081.00.01647
1245.00.0166
1434.00.01666
1652.00.01666
1903.00.01659
2193.00.01647
2526.00.01627
2910.00.01602
3352.00.01572
3861.00.01535
4448.00.01494
5124.00.01448
5903.00.01398
6800.00.01344
7834.00.01287
9024.00.01228
10400.00.01167
11980.00.01104
13800.00.01042
15890.00.009788
18310.00.009168
21090.00.008558
24300.00.007964
27990.00.007389
32240.00.006836
37140.00.006308
42790.00.005805
49290.00.005329
56780.00.004881
65410.00.004461
75350.00.004069
86810.00.003704

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 97.53 – 100000