{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ru", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of D+ on Ru(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2887, "q": 0.0428, "mu": 1.961, "epsilonL": 0.0001976, "Eth": 97.53}, "E_min": 97.53, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
97.53	0.0	
112.4	4.936e-05	
129.4	0.0002506	
149.1	0.0007104	
171.8	0.001551	
197.9	0.002859	
227.9	0.00461	
262.6	0.006638	
302.5	0.00869	
348.5	0.01055	
401.4	0.0121	
462.4	0.01333	
532.7	0.01427	
613.7	0.01499	
707.0	0.01554	
814.4	0.01595	
938.2	0.01625	
1081.0	0.01647	
1245.0	0.0166	
1434.0	0.01666	
1652.0	0.01666	
1903.0	0.01659	
2193.0	0.01647	
2526.0	0.01627	
2910.0	0.01602	
3352.0	0.01572	
3861.0	0.01535	
4448.0	0.01494	
5124.0	0.01448	
5903.0	0.01398	
6800.0	0.01344	
7834.0	0.01287	
9024.0	0.01228	
10400.0	0.01167	
11980.0	0.01104	
13800.0	0.01042	
15890.0	0.009788	
18310.0	0.009168	
21090.0	0.008558	
24300.0	0.007964	
27990.0	0.007389	
32240.0	0.006836	
37140.0	0.006308	
42790.0	0.005805	
49290.0	0.005329	
56780.0	0.004881	
65410.0	0.004461	
75350.0	0.004069	
86810.0	0.003704	
-----