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Plasma-Surface Interaction Data Set 353

Sputtering of H+ on Ru(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Ru(pc) at 300 K

angle = 0.0 deg E /eV P
194.70.0
221.13.054e-05
251.20.0001205
285.30.0002886
324.00.0005544
368.10.0009278
418.10.0014
474.90.00194
539.40.002501
612.60.003036
695.90.00351
790.40.003906
897.80.004221
1020.00.004462
1158.00.00464
1316.00.004765
1494.00.004846
1697.00.004892
1928.00.004907
2190.00.004896
2487.00.004863
2825.00.00481
3209.00.004739
3645.00.004651
4140.00.004549
4702.00.004434
5341.00.004306
6067.00.004168
6891.00.004021
7827.00.003866
8890.00.003706
10100.00.003541
11470.00.003372
13030.00.003202
14800.00.003032
16810.00.002863
19090.00.002696
21680.00.002531
24630.00.002371
27980.00.002216
31780.00.002066
36090.00.001922
41000.00.001784
46570.00.001653
52890.00.001529
60080.00.001411
68240.00.0013
77510.00.001196
88040.00.001099

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 194.7 – 100000