pwiDB

Plasma-Surface Interaction Data Set 352

Sputtering of Xe⁺ on Mo(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe⁺ on Mo(pc) at 300 K

angle = 0.0 deg	E /eV	P
	47.4	0.0
	55.42	0.0002801
	64.79	0.00119
	75.74	0.003134
	88.55	0.006785
	103.5	0.01319
	121.0	0.02391
	141.5	0.04121
	165.4	0.06823
	193.4	0.1091
	226.1	0.1687
	264.3	0.2525
	309.0	0.3652
	361.2	0.5098
	422.3	0.6867
	493.6	0.8927
	577.1	1.122
	674.7	1.369
	788.7	1.627
	922.1	1.891
	1078.0	2.159
	1260.0	2.431
	1473.0	2.707
	1722.0	2.987
	2014.0	3.273
	2354.0	3.567
	2752.0	3.87
	3217.0	4.183
	3761.0	4.505
	4397.0	4.838
	5141.0	5.182
	6010.0	5.536
	7026.0	5.9
	8214.0	6.273
	9603.0	6.654
	11230.0	7.042
	13120.0	7.435
	15340.0	7.832
	17940.0	8.231
	20970.0	8.629
	24520.0	9.025
	28660.0	9.417
	33510.0	9.801
	39170.0	10.17
	45790.0	10.54
	53530.0	10.88
	62590.0	11.21
	73170.0	11.51
	85540.0	11.79

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.2401
q = 32.57
mu = 1.669
epsilonL = 1.179e-06
Eth = 47.4

Fit range

E = 47.4 – 100000