Return to search

Plasma-Surface Interaction Data Set 351

Sputtering of Mo+ on Mo(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Mo+ on Mo(pc) at 300 K

angle = 0.0 deg E /eV P
31.477.961e-38
37.13.414e-05
43.740.0002204
51.570.0007612
60.790.002037
71.660.004734
84.480.01003
99.60.01983
117.40.03695
138.40.06503
163.20.1078
192.40.1678
226.80.2444
267.30.3339
315.20.4307
371.50.5297
438.00.6279
516.40.7245
608.70.8201
717.60.9159
846.01.013
997.31.113
1176.01.217
1386.01.325
1634.01.437
1926.01.555
2271.01.678
2677.01.806
3156.01.94
3720.02.078
4386.02.221
5170.02.368
6095.02.518
7186.02.672
8471.02.827
9987.02.985
11770.03.143
13880.03.301
16360.03.457
19290.03.611
22740.03.762
26810.03.908
31600.04.048
37250.04.18
43920.04.304
51770.04.417
61040.04.519
71950.04.607
84830.04.68

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 31.47 – 100000