{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Mo", "surface_phase": "pc", "species": {"text": "Mo+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Mo+ on Mo(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.358, "q": 12.27, "mu": 2.184, "epsilonL": 1.876e-06, "Eth": 31.47}, "E_min": 31.47, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
31.47	7.961e-38	
37.1	3.414e-05	
43.74	0.0002204	
51.57	0.0007612	
60.79	0.002037	
71.66	0.004734	
84.48	0.01003	
99.6	0.01983	
117.4	0.03695	
138.4	0.06503	
163.2	0.1078	
192.4	0.1678	
226.8	0.2444	
267.3	0.3339	
315.2	0.4307	
371.5	0.5297	
438.0	0.6279	
516.4	0.7245	
608.7	0.8201	
717.6	0.9159	
846.0	1.013	
997.3	1.113	
1176.0	1.217	
1386.0	1.325	
1634.0	1.437	
1926.0	1.555	
2271.0	1.678	
2677.0	1.806	
3156.0	1.94	
3720.0	2.078	
4386.0	2.221	
5170.0	2.368	
6095.0	2.518	
7186.0	2.672	
8471.0	2.827	
9987.0	2.985	
11770.0	3.143	
13880.0	3.301	
16360.0	3.457	
19290.0	3.611	
22740.0	3.762	
26810.0	3.908	
31600.0	4.048	
37250.0	4.18	
43920.0	4.304	
51770.0	4.417	
61040.0	4.519	
71950.0	4.607	
84830.0	4.68	
-----