pwiDB

Plasma-Surface Interaction Data Set 350

Sputtering of Kr⁺ on Mo(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Mo(pc) at 300 K

angle = 0.0 deg	E /eV	P
	38.63	0.0
	45.35	0.0002928
	53.24	0.001273
	62.51	0.0034
	73.38	0.00743
	86.15	0.0145
	101.1	0.02621
	118.7	0.04468
	139.4	0.07245
	163.6	0.1121
	192.1	0.1656
	225.5	0.2337
	264.7	0.3155
	310.8	0.4085
	364.9	0.5093
	428.3	0.6149
	502.8	0.7227
	590.3	0.8314
	693.0	0.9407
	813.6	1.051
	955.1	1.162
	1121.0	1.275
	1316.0	1.391
	1545.0	1.51
	1814.0	1.632
	2130.0	1.758
	2500.0	1.888
	2935.0	2.021
	3446.0	2.159
	4045.0	2.299
	4749.0	2.443
	5575.0	2.589
	6545.0	2.738
	7683.0	2.887
	9020.0	3.037
	10590.0	3.187
	12430.0	3.336
	14590.0	3.483
	17130.0	3.627
	20110.0	3.766
	23610.0	3.901
	27720.0	4.029
	32540.0	4.149
	38200.0	4.26
	44850.0	4.361
	52650.0	4.45
	61810.0	4.525
	72560.0	4.587
	85180.0	4.632

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1412
q = 11.94
mu = 1.691
epsilonL = 2.396e-06
Eth = 38.63

Fit range

E = 38.63 – 100000