{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Mo", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Kr+ on Mo(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1412, "q": 11.94, "mu": 1.691, "epsilonL": 2.396e-06, "Eth": 38.63}, "E_min": 38.63, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
38.63	0.0	
45.35	0.0002928	
53.24	0.001273	
62.51	0.0034	
73.38	0.00743	
86.15	0.0145	
101.1	0.02621	
118.7	0.04468	
139.4	0.07245	
163.6	0.1121	
192.1	0.1656	
225.5	0.2337	
264.7	0.3155	
310.8	0.4085	
364.9	0.5093	
428.3	0.6149	
502.8	0.7227	
590.3	0.8314	
693.0	0.9407	
813.6	1.051	
955.1	1.162	
1121.0	1.275	
1316.0	1.391	
1545.0	1.51	
1814.0	1.632	
2130.0	1.758	
2500.0	1.888	
2935.0	2.021	
3446.0	2.159	
4045.0	2.299	
4749.0	2.443	
5575.0	2.589	
6545.0	2.738	
7683.0	2.887	
9020.0	3.037	
10590.0	3.187	
12430.0	3.336	
14590.0	3.483	
17130.0	3.627	
20110.0	3.766	
23610.0	3.901	
27720.0	4.029	
32540.0	4.149	
38200.0	4.26	
44850.0	4.361	
52650.0	4.45	
61810.0	4.525	
72560.0	4.587	
85180.0	4.632	
-----