pwiDB

Plasma-Surface Interaction Data Set 348

Sputtering of Ne⁺ on Mo(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Mo(pc) at 300 K

angle = 0.0 deg	E /eV	P
	23.62	0.0
	28.01	4.082e-05
	33.21	0.0003839
	39.38	0.001684
	46.7	0.005367
	55.37	0.01412
	65.66	0.03199
	77.86	0.06291
	92.33	0.1072
	109.5	0.1594
	129.8	0.2119
	154.0	0.2597
	182.6	0.3022
	216.5	0.3405
	256.7	0.3764
	304.4	0.4112
	361.0	0.4457
	428.0	0.4806
	507.6	0.5162
	601.9	0.5524
	713.7	0.5894
	846.4	0.6271
	1004.0	0.6653
	1190.0	0.7039
	1411.0	0.7426
	1673.0	0.7812
	1984.0	0.8195
	2353.0	0.8572
	2790.0	0.8939
	3309.0	0.9294
	3924.0	0.9633
	4653.0	0.9952
	5517.0	1.025
	6543.0	1.052
	7758.0	1.076
	9200.0	1.096
	10910.0	1.112
	12940.0	1.124
	15340.0	1.132
	18190.0	1.134
	21570.0	1.131
	25580.0	1.123
	30330.0	1.109
	35970.0	1.089
	42650.0	1.064
	50580.0	1.034
	59970.0	0.9983
	71120.0	0.9587
	84330.0	0.9153

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.2205
q = 2.9
mu = 2.651
epsilonL = 1.565e-05
Eth = 23.62

Fit range

E = 23.62 – 100000