{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Mo", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on Mo(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2205, "q": 2.9, "mu": 2.651, "epsilonL": 1.565e-05, "Eth": 23.62}, "E_min": 23.62, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
23.62	0.0	
28.01	4.082e-05	
33.21	0.0003839	
39.38	0.001684	
46.7	0.005367	
55.37	0.01412	
65.66	0.03199	
77.86	0.06291	
92.33	0.1072	
109.5	0.1594	
129.8	0.2119	
154.0	0.2597	
182.6	0.3022	
216.5	0.3405	
256.7	0.3764	
304.4	0.4112	
361.0	0.4457	
428.0	0.4806	
507.6	0.5162	
601.9	0.5524	
713.7	0.5894	
846.4	0.6271	
1004.0	0.6653	
1190.0	0.7039	
1411.0	0.7426	
1673.0	0.7812	
1984.0	0.8195	
2353.0	0.8572	
2790.0	0.8939	
3309.0	0.9294	
3924.0	0.9633	
4653.0	0.9952	
5517.0	1.025	
6543.0	1.052	
7758.0	1.076	
9200.0	1.096	
10910.0	1.112	
12940.0	1.124	
15340.0	1.132	
18190.0	1.134	
21570.0	1.131	
25580.0	1.123	
30330.0	1.109	
35970.0	1.089	
42650.0	1.064	
50580.0	1.034	
59970.0	0.9983	
71120.0	0.9587	
84330.0	0.9153	
-----