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Plasma-Surface Interaction Data Set 347

Sputtering of O⁺ on Mo(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of O⁺ on Mo(pc) at 300 K

angle = 0.0 deg	E /eV	P
	23.92	5.09e-42
	28.35	6.577e-05
	33.61	0.0005406
	39.85	0.00217
	47.24	0.006428
	56.0	0.0158
	66.39	0.03346
	78.71	0.06165
	93.31	0.09917
	110.6	0.1411
	131.1	0.1821
	155.5	0.2193
	184.3	0.2524
	218.5	0.2825
	259.0	0.3107
	307.1	0.3379
	364.1	0.3648
	431.6	0.3917
	511.7	0.4189
	606.6	0.4464
	719.1	0.4742
	852.5	0.5023
	1011.0	0.5304
	1198.0	0.5585
	1420.0	0.5864
	1684.0	0.614
	1996.0	0.6409
	2367.0	0.6669
	2806.0	0.6919
	3326.0	0.7156
	3943.0	0.7377
	4674.0	0.7579
	5542.0	0.776
	6570.0	0.7916
	7788.0	0.8044
	9233.0	0.8143
	10950.0	0.8208
	12980.0	0.8238
	15380.0	0.823
	18240.0	0.8183
	21620.0	0.8096
	25630.0	0.7968
	30390.0	0.7799
	36020.0	0.7592
	42710.0	0.7348
	50630.0	0.7072
	60020.0	0.6766
	71150.0	0.6437
	84350.0	0.6089

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1762
q = 2.107
mu = 2.482
epsilonL = 2.069e-05
Eth = 23.92

Fit range

E = 23.92 – 100000