{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Mo", "surface_phase": "pc", "species": {"text": "O+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of O+ on Mo(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1762, "q": 2.107, "mu": 2.482, "epsilonL": 2.069e-05, "Eth": 23.92}, "E_min": 23.92, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
23.92	5.09e-42	
28.35	6.577e-05	
33.61	0.0005406	
39.85	0.00217	
47.24	0.006428	
56.0	0.0158	
66.39	0.03346	
78.71	0.06165	
93.31	0.09917	
110.6	0.1411	
131.1	0.1821	
155.5	0.2193	
184.3	0.2524	
218.5	0.2825	
259.0	0.3107	
307.1	0.3379	
364.1	0.3648	
431.6	0.3917	
511.7	0.4189	
606.6	0.4464	
719.1	0.4742	
852.5	0.5023	
1011.0	0.5304	
1198.0	0.5585	
1420.0	0.5864	
1684.0	0.614	
1996.0	0.6409	
2367.0	0.6669	
2806.0	0.6919	
3326.0	0.7156	
3943.0	0.7377	
4674.0	0.7579	
5542.0	0.776	
6570.0	0.7916	
7788.0	0.8044	
9233.0	0.8143	
10950.0	0.8208	
12980.0	0.8238	
15380.0	0.823	
18240.0	0.8183	
21620.0	0.8096	
25630.0	0.7968	
30390.0	0.7799	
36020.0	0.7592	
42710.0	0.7348	
50630.0	0.7072	
60020.0	0.6766	
71150.0	0.6437	
84350.0	0.6089	
-----