pwiDB

Plasma-Surface Interaction Data Set 346

Sputtering of N⁺ on Mo(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of N⁺ on Mo(pc) at 300 K

angle = 0.0 deg	E /eV	P
	28.26	0.0
	33.38	0.0003545
	39.44	0.00169
	46.6	0.004758
	55.06	0.01068
	65.05	0.02086
	76.85	0.03671
	90.8	0.05901
	107.3	0.08735
	126.8	0.12
	149.8	0.1547
	176.9	0.1892
	209.0	0.2222
	247.0	0.2533
	291.8	0.2825
	344.8	0.3101
	407.3	0.3367
	481.2	0.3624
	568.6	0.3876
	671.8	0.4124
	793.7	0.4369
	937.7	0.4611
	1108.0	0.485
	1309.0	0.5085
	1546.0	0.5315
	1827.0	0.5538
	2159.0	0.5753
	2550.0	0.5958
	3013.0	0.615
	3560.0	0.6329
	4206.0	0.6492
	4970.0	0.6636
	5872.0	0.676
	6937.0	0.686
	8196.0	0.6935
	9683.0	0.6982
	11440.0	0.7
	13520.0	0.6987
	15970.0	0.6942
	18870.0	0.6864
	22290.0	0.6752
	26340.0	0.6608
	31120.0	0.6432
	36770.0	0.6227
	43440.0	0.5995
	51320.0	0.5739
	60630.0	0.5465
	71640.0	0.5175
	84640.0	0.4874

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1157
q = 1.79
mu = 1.803
epsilonL = 2.434e-05
Eth = 28.26

Fit range

E = 28.26 – 100000